This is considered the standard type of self-sensing cantilever. It exhibits a sharp tip made of silicon with a tip radius of <15 nm. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.
This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).
Models & Specifications
PRSA-L300-F50/80-Si-PCB/CHP Probe Specifications
(Available in two specification ranges with a medium frequency of 50 kHz or 80 kHz depending on cantilever thickness.)
| Common (for both types) | |
|---|---|
| Silicon tip radius (rtip) | < 15 nm |
| Cantilever length, width (l/w) | l = 305 µm, w = 110 µm |
| Sensitivity (s) | 1-2 µV/nm |
| Applications | AFM, nanoprobing, force measurement in-situ SEM or TEM, etc. |
| PRSA-L300-F50-Si-PCB | |
| Resonant frequency (fR) | 30…65 kHz |
| Stiffness (k) | 1…15 N/m |
| PRSA-L300-F80-Si-PCB | |
| Resonant frequency (fR) | 65…95 kHz |
| Stiffness (k) | 15…56 N/m |
PRSA-L100-F400-Si-PCB Probe Specifications
| Silicon tip radius (rtip) | < 15 nm |
| Cantilever length, width (l/w) | l = 110 µm, w = 48 µm |
| Sensitivity (s) | 2 µV/nm |
| Applications | AFM, nanoprobing, force measurement in-situ SEM or TEM, etc. |
| Resonant frequency (fR) | 250…550 kHz |
| Stiffness (k) | 14…170 N/m |
PRS-L70-F900-Si-PCB/CHP Probe Specifications
| Silicon tip radius (rtip) | < 15 nm |
| Cantilever length, width (l/w) | l = 70…85 µm, w = 30 µm |
| Sensitivity (s) | 3 µV/nm |
| Applications | Tapping mode AFM, nanoprobing, force measurement in-situ SEM or TEM, etc. |
| Resonant frequency (fR) | 500…1300 kHz |
| Stiffness (k) | 35…400 N/m |
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