These are self-sensing cantilevers with a hard, sharp, long-life single crystal diamond tip (SCD). The cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its bottom side.
This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).
Models & Specifications
PRSA 300×100µm SCD Probe Specifications
(Available in two specification ranges with a medium frequency of 50 kHz or 80 kHz depending on cantilever thickness.)
| Silicon tip radius (rtip) | < 15 nm |
| Cantilever length, width (l/w) | l = 300 µm, w = 110 µm |
| Sensitivity (s) | 1-2 µV/nm |
| Applications | AFM, nanoindentation, scratching, imaging of high aspect ratio sample features, force measurement in-situ SEM or TEM |
| Resonant frequency (fR) | 30…65 kHz |
| Stiffness (k) | 1…15 N/m |
PRSA 100×48µm SCD Probe Specifications
| Silicon tip radius (rtip) | < 15 nm |
| Cantilever length, width (l/w) | l = 110 µm, w = 48 µm |
| Sensitivity (s) | 2 µV/nm |
| Applications | AFM, nanoindentation, scratching, imaging of high aspect ratio sample features, force measurement in-situ SEM or TEM |
| Resonant frequency (fR) | 250…550 kHz |
| Stiffness (k) | 14…170 N/m |
PRS 450×100µm SCD Probe Specifications
| Silicon tip radius (rtip) | < 15 nm |
| Cantilever length, width (l/w) | l = 450 µm, w = 100 µm |
| Sensitivity (s) | 1…2 µV/nm |
| Applications | AFM, nanoindentation, scratching, imaging of high aspect ratio sample features, force measurement in-situ SEM or TEM |
| Resonant frequency (fR) | 14…48 kHz |
| Stiffness (k) | 0.5…24 N/m |
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